Flexible heaters from Watlow are thin, bendable and shaped to fit almost any type of equipment. Heat can be applied to the most complex shapes, geometries, curves and pipes conceivable without sacrificing efficiency or dependability.
Excellent heat transfer results from the heater’s thin design and direct bonding to an application. Flexible heaters provide fast heat-up and cool-down rates, uniform heat distribution and high watt densities.
Watlow’s gas line heaters are designed to regulate temperatures in gas lines in order to prevent condensation in the gas line.
Tetraethyl orthosilicate (TEOS), boron trichloride (BCl3), aluminum chloride (AlCl3), chlorine trifluoride (ClF3) and dichlorosilane (DCS) are gases that condense or liquefy due to a phase shift at low temperatures. In semiconductor processes, the condensation occurs in the gas line and puddles in the shower head before being injected into the vacuum chamber. A substantial number of wafer defects will occur if liquefied gases are injected into the vacuum chamber. Uniform heating of the lines with gas line heaters will prevent condensation. TEOS lines are typically heated above 194°F (90°C) and BCl3 above 86°F (30°C), depending on pressure and flow rate. The optimum line temperature will vary depending on the process parameters.
|Material||Maximum Operating Temperatures||Maximum Watt Densities|
|Easy to install two part system||
|Flexible heater design||
|Flexible standard system components||